Inventor
SPIKER NATHAN
US9 patents
Patents
9 patentsUS10978330B2Apr 13, 2021
On the fly automatic wafer centering method and apparatus
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US10134623B2Nov 20, 2018
On the fly automatic wafer centering method and apparatus
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US11776834B2Oct 3, 2023
On the fly automatic wafer centering method and apparatus
BROOKS AUTOMATION INC1 citations71
US10651067B2May 12, 2020
Method and apparatus for substrate transport apparatus position compensation
BROOKS AUTOMATION INC2 citations71
US11972965B2Apr 30, 2024
Method and apparatus for substrate transport apparatus position compensation
BROOKS AUTOMATION INC0 citations61
US11821953B2Nov 21, 2023
Method and apparatus for brushless electrical machine control
BROOKS AUTOMATION INC0 citations61
US11251059B2Feb 15, 2022
Method and apparatus for substrate transport apparatus position compensation
BROOKS AUTOMATION INC0 citations61
US11181582B2Nov 23, 2021
Method and apparatus for brushless electrical machine control
BROOKS AUTOMATION INC0 citations61
US10564221B2Feb 18, 2020
Method and apparatus for brushless electrical machine control
BROOKS AUTOMATION INC0 citations51