Inventor

JI HANCHUAN

CN2 patents

Patents

2 patents

US10133153B2Nov 20, 2018

Self-damping shutter apparatus for exposure system of photolithography machine

SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD0 citations30

US10415639B2Sep 17, 2019

Adjustable magnetic buoyancy gravity compensator

SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD0 citations26