Inventor
FODOR MARK
US13 patents
⚠️ This page may combine multiple inventors who share the name “FODOR MARK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS6187072B1Feb 13, 2001
Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions
APPLIED MATERIALS INC154 citations99
US6358573B1Mar 19, 2002
Mixed frequency CVD process
APPLIED MATERIALS INC130 citations98
US6193802B1Feb 27, 2001
Parallel plate apparatus for in-situ vacuum line cleaning for substrate processing equipment
APPLIED MATERIALS INC191 citations98
US6194628B1Feb 27, 2001
Method and apparatus for cleaning a vacuum line in a CVD system
APPLIED MATERIALS INC170 citations98
US6098568AAug 8, 2000
Mixed frequency CVD apparatus
APPLIED MATERIALS INC106 citations97
US6517913B1Feb 11, 2003
Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions
APPLIED MATERIALS INC65 citations96
US6680420B2Jan 20, 2004
Apparatus for cleaning an exhaust line in a semiconductor processing system
APPLIED MATERIALS INC45 citations95
US6689930B1Feb 10, 2004
Method and apparatus for cleaning an exhaust line in a semiconductor processing system
APPLIED MATERIALS INC51 citations93
US6506994B2Jan 14, 2003
Low profile thick film heaters in multi-slot bake chamber
APPLIED MATERIALS INC22 citations92
US6354241B1Mar 12, 2002
Heated electrostatic particle trap for in-situ vacuum line cleaning of a substrated processing
APPLIED MATERIALS INC48 citations92
US11136665B2Oct 5, 2021
Shadow ring for modifying wafer edge and bevel deposition
APPLIED MATERIALS INC1 citations61