Inventor

CHENG SIU F

US8 patents

⚠️ This page may combine multiple inventors who share the name “CHENG SIU F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US11136665B2Oct 5, 2021

Shadow ring for modifying wafer edge and bevel deposition

APPLIED MATERIALS INC1 citations61

US8349741B2Jan 8, 2013

Amorphous carbon deposition method for improved stack defectivity

APPLIED MATERIALS INC0 citations51

CHENG SIU F

2 patents

US8278139B2Oct 2, 2012

Passivating glue layer to improve amorphous carbon to metal adhesion

CHENG SIU F2 citations58

US8569105B2Oct 29, 2013

Passivating glue layer to improve amorphous carbon to metal adhesion

CHENG SIU F0 citations47

YU HANG

1 patent

US8227352B2Jul 24, 2012

Amorphous carbon deposition method for improved stack defectivity

YU HANG13 citations79

AEROSPACE MATERIALS PROC LLC

1 patent

US10118315B1Nov 6, 2018

Preparing tool surfaces for composites

AEROSPACE MATERIALS PROC LLC14 citations78

DU BOIS DALE R

1 patent

US10227695B2Mar 12, 2019

Shadow ring for modifying wafer edge and bevel deposition

DU BOIS DALE R4 citations67

ZHOU JIANHUA

1 patent

US8097082B2Jan 17, 2012

Nonplanar faceplate for a plasma processing chamber

ZHOU JIANHUA4 citations59