Inventor
SIMMONS RICHARD R
US7 patents
⚠️ This page may combine multiple inventors who share the name “SIMMONS RICHARD R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
5 patentsUS10325753B2Jun 18, 2019
Method and system for focus adjustment of a multi-beam scanning electron microscopy system
KLA TENCOR CORP4 citations71
US10192716B2Jan 29, 2019
Multi-beam dark field imaging
KLA TENCOR CORP4 citations71
US10460905B2Oct 29, 2019
Backscattered electrons (BSE) imaging using multi-beam tools
KLA TENCOR CORP1 citations61
US10366862B2Jul 30, 2019
Method and system for noise mitigation in a multi-beam scanning electron microscopy system
KLA TENCOR CORP1 citations61
US10861671B2Dec 8, 2020
Method and system for focus adjustment of a multi-beam scanning electron microscopy system
KLA TENCOR CORP0 citations40