Inventor
KNIPPELMEYER RAINER
US36 patents
⚠️ This page may combine multiple inventors who share the name “KNIPPELMEYER RAINER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL MICROSCOPY GMBH
10 patentsUS10622184B2Apr 14, 2020
Objective lens arrangement usable in particle-optical systems
ZEISS CARL MICROSCOPY GMBH29 citations94
US10541112B2Jan 21, 2020
Charged particle beam system and method of operating the same
ZEISS CARL MICROSCOPY GMBH28 citations94
US10354831B2Jul 16, 2019
Charged particle inspection method and charged particle system
ZEISS CARL MICROSCOPY GMBH30 citations94
US9263233B2Feb 16, 2016
Charged particle multi-beam inspection system and method of operating the same
ZEISS CARL MICROSCOPY GMBH39 citations93
US9224576B2Dec 29, 2015
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
ZEISS CARL MICROSCOPY GMBH18 citations92
US10504681B2Dec 10, 2019
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
ZEISS CARL MICROSCOPY GMBH3 citations84
US9673024B2Jun 6, 2017
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
ZEISS CARL MICROSCOPY GMBH9 citations84
US9324537B2Apr 26, 2016
Charged particle inspection method and charged particle system
ZEISS CARL MICROSCOPY GMBH8 citations84
US10121635B2Nov 6, 2018
Charged particle beam system and method of operating the same
ZEISS CARL MICROSCOPY GMBH3 citations73
US11527379B2Dec 13, 2022
Objective lens arrangement usable in particle-optical systems
ZEISS CARL MICROSCOPY GMBH0 citations62
ZEISS CARL NTS GMBH
8 patentsUS7084406B2Aug 1, 2006
Detector arrangement and detection method
ZEISS CARL NTS GMBH16 citations84
US6967328B2Nov 22, 2005
Method for the electron-microscopic observation of a semiconductor arrangement and apparatus therefor
ZEISS CARL NTS GMBH18 citations84
US6946657B2Sep 20, 2005
Electron microscopy system
ZEISS CARL NTS GMBH13 citations84
US6891168B2May 10, 2005
Particle-optical apparatus and method for operating the same
ZEISS CARL NTS GMBH16 citations84
US6878936B2Apr 12, 2005
Applications operating with beams of charged particles
ZEISS CARL NTS GMBH17 citations84
US7135677B2Nov 14, 2006
Beam guiding arrangement, imaging method, electron microscopy system and electron lithography system
ZEISS CARL NTS GMBH11 citations82
US7105814B2Sep 12, 2006
Electron microscopy system and electron microscopy method
ZEISS CARL NTS GMBH8 citations74
US6914249B2Jul 5, 2005
Particle-optical apparatus, electron microscopy system and electron lithography system
ZEISS CARL NTS GMBH9 citations73
KLA TENCOR CORP
8 patentsUS10643819B2May 5, 2020
Method and system for charged particle microscopy with improved image beam stabilization and interrogation
KLA TENCOR CORP6 citations81
US10325753B2Jun 18, 2019
Method and system for focus adjustment of a multi-beam scanning electron microscopy system
KLA TENCOR CORP4 citations71
US10192716B2Jan 29, 2019
Multi-beam dark field imaging
KLA TENCOR CORP4 citations71
US10460905B2Oct 29, 2019
Backscattered electrons (BSE) imaging using multi-beam tools
KLA TENCOR CORP1 citations61
US10366862B2Jul 30, 2019
Method and system for noise mitigation in a multi-beam scanning electron microscopy system
KLA TENCOR CORP1 citations61
US11120969B2Sep 14, 2021
Method and system for charged particle microscopy with improved image beam stabilization and interrogation
KLA TENCOR CORP0 citations59
US11302511B2Apr 12, 2022
Field curvature correction for multi-beam inspection systems
KLA TENCOR CORP0 citations50
US10861671B2Dec 8, 2020
Method and system for focus adjustment of a multi-beam scanning electron microscopy system
KLA TENCOR CORP0 citations40
KNIPPELMEYER RAINER
5 patentsUS9336981B2May 10, 2016
Charged particle detection system and multi-beamlet inspection system
KNIPPELMEYER RAINER33 citations93
US8097847B2Jan 17, 2012
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
KNIPPELMEYER RAINER16 citations91
US8637834B2Jan 28, 2014
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
KNIPPELMEYER RAINER17 citations90
US8334701B2Dec 18, 2012
Repairing defects
KNIPPELMEYER RAINER2 citations60
US8907277B2Dec 9, 2014
Reducing particle implantation
KNIPPELMEYER RAINER0 citations31