Inventor
CHENG XIAOYANG
CN7 patents
⚠️ This page may combine multiple inventors who share the name “CHENG XIAOYANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD
5 patentsUS10699881B2Jun 30, 2020
Impedance matching system, impedance matching method, and semiconductor processing apparatus thereof
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD6 citations69
US10643822B2May 5, 2020
Impedance matching method and device for pulsed radio frequency power supply
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD4 citations68
US11189465B2Nov 30, 2021
Adjustable capacitor, impedance matching device and semiconductor processing apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD1 citations60
US11056316B2Jul 6, 2021
Radio frequency pulse matching method and device thereof and pulsing plasma generation system
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations50
US10879866B2Dec 29, 2020
Filter circuit, heating circuit, and semiconductor processing apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations50