Inventor
KATAGIRI SOUICHI
JP30 patents
⚠️ This page may combine multiple inventors who share the name “KATAGIRI SOUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
13 patentsUS6723144B2Apr 20, 2004
Semiconductor device fabricating method
HITACHI LTD38 citations92
US7745237B2Jun 29, 2010
Pattern forming method and pattern forming system
HITACHI LTD15 citations84
US6565424B2May 20, 2003
Method and apparatus for planarizing semiconductor device
HITACHI LTD13 citations84
US6524961B1Feb 25, 2003
Semiconductor device fabricating method
HITACHI LTD14 citations84
US6663468B2Dec 16, 2003
Method for polishing surface of semiconductor device substrate
HITACHI LTD18 citations83
US6390895B1May 21, 2002
Flattening and machining method and apparatus
HITACHI LTD11 citations74
US9837243B2Dec 5, 2017
Ion pump and charged particle beam device using the same
HITACHI LTD3 citations73
US6612912B2Sep 2, 2003
Method for fabricating semiconductor device and processing apparatus for processing semiconductor device
HITACHI LTD8 citations73
US6734103B2May 11, 2004
Method of polishing a semiconductor device
HITACHI LTD5 citations63
US6477825B2Nov 12, 2002
Flattening and machining method and apparatus
HITACHI LTD3 citations63
US6908860B2Jun 21, 2005
Method for manufacturing semiconductor device and apparatus for manufacturing thereof
HITACHI LTD3 citations62
US6589871B2Jul 8, 2003
Processing method, measuring method and producing method of semiconductor devices
HITACHI LTD5 citations62
US7144298B2Dec 5, 2006
Method for manufacturing semiconductor device and apparatus for manufacturing thereof
HITACHI LTD0 citations51
HITACHI HIGH TECH CORP
11 patentsUS7582885B2Sep 1, 2009
Charged particle beam apparatus
HITACHI HIGH TECH CORP61 citations98
US7615765B2Nov 10, 2009
Charged particle beam apparatus
HITACHI HIGH TECH CORP23 citations92
US7781743B2Aug 24, 2010
Charged particle beam system and method for evacuation of the system
HITACHI HIGH TECH CORP16 citations84
US10903037B2Jan 26, 2021
Charged particle beam device
HITACHI HIGH TECH CORP2 citations72
US8866371B2Oct 21, 2014
Electric field discharge-type electron source
HITACHI HIGH TECH CORP2 citations63
US7759652B2Jul 20, 2010
Electron lens and charged particle beam apparatus
HITACHI HIGH TECH CORP4 citations63
US11227740B2Jan 18, 2022
Electron gun and electron beam application device
HITACHI HIGH TECH CORP0 citations62
US10804084B2Oct 13, 2020
Vacuum apparatus
HITACHI HIGH TECH CORP1 citations62
US11508544B2Nov 22, 2022
Thermoelectric field emission electron source and electron beam application device
HITACHI HIGH TECH CORP0 citations60
US11894211B2Feb 6, 2024
Electron beam apparatus and method for controlling electron beam apparatus
HITACHI HIGH TECH CORP0 citations58
US9006654B2Apr 14, 2015
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations50
KASUYA KEIGO
3 patentsUS8426835B2Apr 23, 2013
Charged particle radiation device
KASUYA KEIGO8 citations82
US8319193B2Nov 27, 2012
Charged particle beam apparatus, and method of controlling the same
KASUYA KEIGO2 citations59
US8772735B2Jul 8, 2014
Charged particle beam apparatus, and method of controlling the same
KASUYA KEIGO1 citations49