P

Inventor

OGAWA TOHRU

JP26 patents
⚠️ This page may combine multiple inventors who share the name “OGAWA TOHRU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SONY CORP

15 patents
US5529951AJun 25, 1996

Method of forming polycrystalline silicon layer on substrate by large area excimer laser irradiation

SONY CORP303 citations99
US6071765AJun 6, 2000

Method of forming polycrystalline silicon layer on substrate and surface treatment apparatus thereof

SONY CORP105 citations98
US5869803AFeb 9, 1999

Method of forming polycrystalline silicon layer on substrate and surface treatment apparatus thereof

SONY CORP104 citations98
US5591566AJan 7, 1997

Method of forming a resist pattern by using a silicon carbide anti-reflective layer

SONY CORP104 citations98
US5698352ADec 16, 1997

Semiconductor device containing Si, O and N anti-reflective layer

SONY CORP75 citations96
US5641607AJun 24, 1997

Anti-reflective layer used to form a semiconductor device

SONY CORP85 citations96
US5472827ADec 5, 1995

Method of forming a resist pattern using an anti-reflective layer

SONY CORP53 citations96
US5472829ADec 5, 1995

Method of forming a resist pattern by using an anti-reflective layer

SONY CORP64 citations96
US5473409ADec 5, 1995

Semiconductor light exposure device

SONY CORP56 citations96
US5670297ASep 23, 1997

Process for the formation of a metal pattern

SONY CORP35 citations93
US5677111AOct 14, 1997

Process for production of micropattern utilizing antireflection film

SONY CORP52 citations92
US5648202AJul 15, 1997

Method of forming a photoresist pattern using an anti-reflective

SONY CORP32 citations92
US5627625AMay 6, 1997

Pattern projecting method

SONY CORP17 citations74
US5311282AMay 10, 1994

High precision stepping aligner having a spiral stepping pattern

SONY CORP10 citations73
US6673526B1Jan 6, 2004

Pattern formation method and method and apparatus for production of a semiconductor device using said method

SONY CORP9 citations71

FUJITSU LTD

5 patents

YANMAR CO LTD

2 patents

ASAHI GLASS CO LTD

1 patent

UBE INDUSTRIES

1 patent

HAYASHIBARA BIOCHEM LAB

1 patent

NAT INST OF ADVANCE IND SCIENC

1 patent