Inventor
TANAKA KEIICHI
JP174 patents
⚠️ This page may combine multiple inventors who share the name “TANAKA KEIICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
21 patentsUS6940582B1Sep 6, 2005
Parallel link mechanism, exposure system and method of manufacturing the same, and method of manufacturing devices
NIKON CORP136 citations98
US6339266B1Jan 15, 2002
Planar motor device, stage unit, exposure apparatus and its making method, and device and its manufacturing method
NIKON CORP83 citations98
US6835941B1Dec 28, 2004
Stage unit and its making method, and exposure apparatus and its making method
NIKON CORP55 citations96
US6720680B1Apr 13, 2004
Flat motor device and its driving method, stage device and its driving method, exposure apparatus and exposure method, and device and its manufacturing method
NIKON CORP65 citations96
US6509957B1Jan 21, 2003
Stage device and exposure apparatus
NIKON CORP55 citations96
US6252234B1Jun 26, 2001
Reaction force isolation system for a planar motor
NIKON CORP55 citations96
US6069418AMay 30, 2000
Electromagnetic motor
NIKON CORP56 citations96
US6788385B2Sep 7, 2004
Stage device, exposure apparatus and method
NIKON CORP82 citations95
US6304320B1Oct 16, 2001
Stage device and a method of manufacturing same, a position controlling method, an exposure device and a method of manufacturing same, and a device and a method of manufacturing same
NIKON CORP65 citations94
US7696653B2Apr 13, 2010
Movable-body apparatus, exposure apparatus and methods comprising same, and device-manufacturing methods
NIKON CORP29 citations93
US7336012B2Feb 26, 2008
Motor, robot, substrate loader, and exposure apparatus
NIKON CORP23 citations93
US6819404B2Nov 16, 2004
Stage device and exposure apparatus
NIKON CORP25 citations93
US6781669B2Aug 24, 2004
Methods and apparatuses for substrate transporting, positioning, holding, and exposure processing, device manufacturing method and device
NIKON CORP26 citations93
US6496248B2Dec 17, 2002
Stage device and exposure apparatus and method
NIKON CORP26 citations93
US6495934B1Dec 17, 2002
Method of manufacturing linear motor, linear motor, stage apparatus equipped with linear motor and exposure apparatus
NIKON CORP40 citations93
US6885430B2Apr 26, 2005
System and method for resetting a reaction mass assembly of a stage assembly
NIKON CORP43 citations92
US6583597B2Jun 24, 2003
Stage apparatus including non-containing gas bearings and microlithography apparatus comprising same
NIKON CORP32 citations91
US6555936B1Apr 29, 2003
Flatmotor device and exposure device
NIKON CORP24 citations90
US7557529B2Jul 7, 2009
Stage unit and exposure apparatus
NIKON CORP15 citations84
US7428958B2Sep 30, 2008
Substrate conveyor apparatus, substrate conveyance method and exposure apparatus
NIKON CORP14 citations84
US6958808B2Oct 25, 2005
System and method for resetting a reaction mass assembly of a stage assembly
NIKON CORP15 citations84
SHARP KK
9 patentsUS7719515B2May 18, 2010
Input device and I/O-integrated display
SHARP KK74 citations98
US6118505ASep 12, 2000
Liquid crystal display device having color organic film as the interlayer insulator
SHARP KK112 citations97
US6724359B2Apr 20, 2004
Electronic device and method for driving the same
SHARP KK55 citations96
US6392728B2May 21, 2002
LCD with color filter substrate with tapering color filter portions overlapped by electrode and black matrix layers
SHARP KK73 citations96
US7075521B2Jul 11, 2006
Input-output integrated type display device
SHARP KK30 citations93
US6801289B2Oct 5, 2004
Liquid crystal display device
SHARP KK27 citations93
US6208394B1Mar 27, 2001
LCD device and method for fabricating the same having color filters and a resinous insulating black matrix on opposite sides of a counter electrode on the same substrate
SHARP KK25 citations93
US7196683B2Mar 27, 2007
Driving method of image display device, driving device of image display device, and image display device
SHARP KK29 citations92
US7113158B1Sep 26, 2006
Image display apparatus
SHARP KK17 citations84
SUMITOMO ELECTRIC INDUSTRIES
5 patentsUS5455383AOct 3, 1995
Shield flat cable
SUMITOMO ELECTRIC INDUSTRIES57 citations96
US6475668B1Nov 5, 2002
Nonaqueous electrolyte battery sealed in a film case
SUMITOMO ELECTRIC INDUSTRIES34 citations92
US6245456B1Jun 12, 2001
Non-aqueous electrolyte battery using a sealing bag comprising heat laminated layers
SUMITOMO ELECTRIC INDUSTRIES31 citations92
US6004693ADec 21, 1999
Non-aqueous electrolyte cell
SUMITOMO ELECTRIC INDUSTRIES37 citations90
US6001505ADec 14, 1999
Nonaqueous electrolyte battery
SUMITOMO ELECTRIC INDUSTRIES20 citations90
TOKYO ELECTRON LTD
5 patentsUS6395094B1May 28, 2002
Process system with transfer unit for object to be processed
TOKYO ELECTRON LTD65 citations94
US6811962B2Nov 2, 2004
Method for developing processing and apparatus for supplying developing solution
TOKYO ELECTRON LTD29 citations92
US6234107B1May 22, 2001
Auxiliary vacuum chamber and vacuum processing unit using same
TOKYO ELECTRON LTD39 citations90
US9349589B2May 24, 2016
Vacuum processing apparatus and vacuum processing method
TOKYO ELECTRON LTD9 citations84
US8021488B2Sep 20, 2011
Sealing structure of vacuum device
TOKYO ELECTRON LTD8 citations84
PANASONIC CORP
2 patentsSEIKO INSTR INC
1 patentTOYAMA CHEMICAL COMPANY LTD
1 patentSII NANOTECHNOLOGY INC
1 patentTANAKA KEIICHI
1 patentYASKAWA DENKI SEISAKUSHO KK
1 patentAPPLIED MATERIALS INC
1 patentTOYAMA CHEMICAL CO LTD
1 patentAGENCY IND SCIENCE TECHN
1 patentShowing the top 50 of 174 patents by PatentIndex Score.