P

Inventor

TANAKA KEIICHI

JP174 patents
⚠️ This page may combine multiple inventors who share the name “TANAKA KEIICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

21 patents
US6940582B1Sep 6, 2005

Parallel link mechanism, exposure system and method of manufacturing the same, and method of manufacturing devices

NIKON CORP136 citations98
US6339266B1Jan 15, 2002

Planar motor device, stage unit, exposure apparatus and its making method, and device and its manufacturing method

NIKON CORP83 citations98
US6835941B1Dec 28, 2004

Stage unit and its making method, and exposure apparatus and its making method

NIKON CORP55 citations96
US6720680B1Apr 13, 2004

Flat motor device and its driving method, stage device and its driving method, exposure apparatus and exposure method, and device and its manufacturing method

NIKON CORP65 citations96
US6509957B1Jan 21, 2003

Stage device and exposure apparatus

NIKON CORP55 citations96
US6252234B1Jun 26, 2001

Reaction force isolation system for a planar motor

NIKON CORP55 citations96
US6069418AMay 30, 2000

Electromagnetic motor

NIKON CORP56 citations96
US6788385B2Sep 7, 2004

Stage device, exposure apparatus and method

NIKON CORP82 citations95
US6304320B1Oct 16, 2001

Stage device and a method of manufacturing same, a position controlling method, an exposure device and a method of manufacturing same, and a device and a method of manufacturing same

NIKON CORP65 citations94
US7696653B2Apr 13, 2010

Movable-body apparatus, exposure apparatus and methods comprising same, and device-manufacturing methods

NIKON CORP29 citations93
US7336012B2Feb 26, 2008

Motor, robot, substrate loader, and exposure apparatus

NIKON CORP23 citations93
US6819404B2Nov 16, 2004

Stage device and exposure apparatus

NIKON CORP25 citations93
US6781669B2Aug 24, 2004

Methods and apparatuses for substrate transporting, positioning, holding, and exposure processing, device manufacturing method and device

NIKON CORP26 citations93
US6496248B2Dec 17, 2002

Stage device and exposure apparatus and method

NIKON CORP26 citations93
US6495934B1Dec 17, 2002

Method of manufacturing linear motor, linear motor, stage apparatus equipped with linear motor and exposure apparatus

NIKON CORP40 citations93
US6885430B2Apr 26, 2005

System and method for resetting a reaction mass assembly of a stage assembly

NIKON CORP43 citations92
US6583597B2Jun 24, 2003

Stage apparatus including non-containing gas bearings and microlithography apparatus comprising same

NIKON CORP32 citations91
US6555936B1Apr 29, 2003

Flatmotor device and exposure device

NIKON CORP24 citations90
US7557529B2Jul 7, 2009

Stage unit and exposure apparatus

NIKON CORP15 citations84
US7428958B2Sep 30, 2008

Substrate conveyor apparatus, substrate conveyance method and exposure apparatus

NIKON CORP14 citations84
US6958808B2Oct 25, 2005

System and method for resetting a reaction mass assembly of a stage assembly

NIKON CORP15 citations84

SHARP KK

9 patents

SUMITOMO ELECTRIC INDUSTRIES

5 patents

TOKYO ELECTRON LTD

5 patents

PANASONIC CORP

2 patents

SEIKO INSTR INC

1 patent

TOYAMA CHEMICAL COMPANY LTD

1 patent

SII NANOTECHNOLOGY INC

1 patent

TANAKA KEIICHI

1 patent

YASKAWA DENKI SEISAKUSHO KK

1 patent

APPLIED MATERIALS INC

1 patent

TOYAMA CHEMICAL CO LTD

1 patent

AGENCY IND SCIENCE TECHN

1 patent

Showing the top 50 of 174 patents by PatentIndex Score.