Inventor
SANO NAOTO
JP25 patents
⚠️ This page may combine multiple inventors who share the name “SANO NAOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
16 patentsUS5121160AJun 9, 1992
Exposure method and apparatus
CANON KK85 citations95
US5846678ADec 8, 1998
Exposure apparatus and device manufacturing method
CANON KK63 citations94
US6322220B1Nov 27, 2001
Exposure apparatus and device manufacturing method using the same
CANON KK20 citations92
US6215806B1Apr 10, 2001
Excimer laser generator provided with a laser chamber with a fluoride passivated inner surface
CANON KK26 citations92
US5661547AAug 26, 1997
Exposure method and apparatus and device produced thereby in which a stop includes an opening which is variable to substantially compensate for a change in bandwidth of a laser beam
CANON KK23 citations92
US5949468ASep 7, 1999
Light quantity measuring system and exposure apparatus using the same
CANON KK25 citations91
US5250797AOct 5, 1993
Exposure method and apparatus for controlling light pulse emission using determined exposure quantities and control parameters
CANON KK50 citations91
US5969799AOct 19, 1999
Exposure apparatus with a pulsed laser
CANON KK13 citations82
US7031364B2Apr 18, 2006
Gas laser device and exposure apparatus using the same
CANON KK8 citations74
US6870865B2Mar 22, 2005
Laser oscillation apparatus, exposure apparatus, semiconductor device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method
CANON KK6 citations74
US5567928AOct 22, 1996
Scanning exposure apparatus and method including controlling irradiation timing of an irradiation beam with respect to relative movement between the beam and a substrate
CANON KK18 citations74
US5597670AJan 28, 1997
Exposure method and apparatus
CANON KK14 citations73
US6795167B2Sep 21, 2004
Projection exposure apparatus and device manufacturing method using the same
CANON KK10 citations71
US6646717B2Nov 11, 2003
Projection exposure apparatus and device manufacturing method using the same
CANON KK2 citations60
US7145925B2Dec 5, 2006
Laser oscillation apparatus, exposure apparatus, semiconductor device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method
CANON KK0 citations52
US6727976B2Apr 27, 2004
Exposure apparatus with a pulsed laser
CANON KK0 citations52
MURATA MANUFACTURING CO
6 patentsUS6538492B2Mar 25, 2003
Power supply, electronic device using the same, and output
MURATA MANUFACTURING CO16 citations82
US6437546B1Aug 20, 2002
DC-to-DC converter and electronic device using the same
MURATA MANUFACTURING CO16 citations82
US7403397B2Jul 22, 2008
Switching power-supply module
MURATA MANUFACTURING CO8 citations73
US6625031B2Sep 23, 2003
Module part and electronic device
MURATA MANUFACTURING CO9 citations73
US6486567B2Nov 26, 2002
Multi-output DC-DC converter and electronic apparatus using the same
MURATA MANUFACTURING CO9 citations72
US6434027B1Aug 13, 2002
Switching power supply having a plurality of output voltages and minimal number of terminals
MURATA MANUFACTURING CO8 citations72