Inventor
KEA MARC JURIAN
US9 patents
Patents
9 patentsUS9715181B2Jul 25, 2017
Method of calibrating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product
ASML NETHERLANDS BV3 citations71
US11392044B2Jul 19, 2022
Method of determining a position of a feature
ASML NETHERLANDS BV2 citations70
US11143971B2Oct 12, 2021
Control based on probability density function of parameter
ASML NETHERLANDS BV3 citations70
US10578980B2Mar 3, 2020
Method of determining a position of a feature
ASML NETHERLANDS BV2 citations70
US9958790B2May 1, 2018
Inspection methods, substrates having metrology targets, lithographic system and device manufacturing method
ASML NETHERLANDS BV2 citations62
US12124179B2Oct 22, 2024
Method of wafer alignment using at resolution metrology on product features
ASML NETHERLANDS BV0 citations61
US11860548B2Jan 2, 2024
Method for characterizing a manufacturing process of semiconductor devices
ASML NETHERLANDS BV1 citations59
US11403453B2Aug 2, 2022
Defect prediction
ASML NETHERLANDS BV0 citations59
US9507279B2Nov 29, 2016
Method of operating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product
ASML NETHERLANDS BV2 citations59