Inventor

YUDHISTIRA YASRI

US4 patents

⚠️ This page may combine multiple inventors who share the name “YUDHISTIRA YASRI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHARTERED SEMICONDUCTOR MFG

2 patents

US7537870B2May 26, 2009

Lithography process optimization and system

CHARTERED SEMICONDUCTOR MFG12 citations73

US7622403B2Nov 24, 2009

Semiconductor processing system with ultra low-K dielectric

CHARTERED SEMICONDUCTOR MFG2 citations60

ASML NETHERLANDS BV

2 patents

US11403453B2Aug 2, 2022

Defect prediction

ASML NETHERLANDS BV0 citations59

US11054754B2Jul 6, 2021

Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method

ASML NETHERLANDS BV0 citations48