Inventor
LIU CHENGYU
US5 patents
⚠️ This page may combine multiple inventors who share the name “LIU CHENGYU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS11450514B1Sep 20, 2022
Methods of reducing particles in a physical vapor deposition (PVD) chamber
APPLIED MATERIALS INC0 citations59
US11830728B2Nov 28, 2023
Methods for seamless gap filling of dielectric material
APPLIED MATERIALS INC0 citations50
US12421594B1Sep 23, 2025
Pulsed voltage waveform delivery for deposition
APPLIED MATERIALS INC0 citations38