Inventor
HERTEL RICHARD J
US28 patents
⚠️ This page may combine multiple inventors who share the name “HERTEL RICHARD J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN ASSOCIATES
11 patentsUS4449885AMay 22, 1984
Wafer transfer system
VARIAN ASSOCIATES183 citations97
US4836733AJun 6, 1989
Wafer transfer system
VARIAN ASSOCIATES242 citations96
US4634331AJan 6, 1987
Wafer transfer system
VARIAN ASSOCIATES73 citations96
US4899059AFeb 6, 1990
Disk scanning apparatus for batch ion implanters
VARIAN ASSOCIATES55 citations95
US5040484AAug 20, 1991
Apparatus for retaining wafers
VARIAN ASSOCIATES84 citations93
US5350427ASep 27, 1994
Wafer retaining platen having peripheral clamp and wafer lifting means
VARIAN ASSOCIATES23 citations92
US4498833AFeb 12, 1985
Wafer orientation system
VARIAN ASSOCIATES27 citations92
US4817556AApr 4, 1989
Apparatus for retaining wafers
VARIAN ASSOCIATES43 citations91
US4744709AMay 17, 1988
Low deflection force sensitive pick
VARIAN ASSOCIATES20 citations81
US4931776AJun 5, 1990
Fluid flow sensor with flexible vane
VARIAN ASSOCIATES12 citations73
US4602713AJul 29, 1986
Multiple wafer holder for a wafer transfer system
VARIAN ASSOCIATES3 citations62
ITT
4 patentsUS5751246AMay 12, 1998
Accountability and theft protection via the global positioning system
ITT436 citations99
US5532690AJul 2, 1996
Apparatus and method for monitoring and bounding the path of a ground vehicle
ITT394 citations99
US5453782ASep 26, 1995
Automatic exposure and gain control for low light level television camera
ITT11 citations74
US4527846AJul 9, 1985
Zoom focus and deflection assembly for electron discharge devices of the camera tube type
ITT1 citations52
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
4 patentsUS10224181B2Mar 5, 2019
Radio frequency extraction system for charge neutralized ion beam
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3 citations72
US9865433B1Jan 9, 2018
Gas injection system for ion beam device
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations71
US10276340B1Apr 30, 2019
Low particle capacitively coupled components for workpiece processing
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC6 citations68
US9589769B2Mar 7, 2017
Apparatus and method for efficient materials use during substrate processing
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations51
FAIRHURST JOHN ROBERT
4 patentsUS8585115B2Nov 19, 2013
Method and apparatus for lifting a horizontally-oriented substrate from a cassette
FAIRHURST JOHN ROBERT6 citations68
US8550520B2Oct 8, 2013
Method and apparatus for manipulating a substrate
FAIRHURST JOHN ROBERT2 citations58
US9218990B2Dec 22, 2015
Method and apparatus for holding a plurality of substrates for processing
FAIRHURST JOHN ROBERT1 citations47
US9070730B2Jun 30, 2015
Method and apparatus for removing a vertically-oriented substrate from a cassette
FAIRHURST JOHN ROBERT0 citations37