Inventor
KO TSUNG-HAN
TW8 patents
Patents
8 patentsUS12094952B2Sep 17, 2024
Air spacer formation with a spin-on dielectric material
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11626482B2Apr 11, 2023
Air spacer formation with a spin-on dielectric material
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12547075B2Feb 10, 2026
Method of forming photoresist pattern
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10796910B2Oct 6, 2020
Method for performing a photolithography process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10573519B2Feb 25, 2020
Method for performing a photolithography process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US12535739B2Jan 27, 2026
Method of forming photoresist pattern
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10157739B2Dec 18, 2018
Orientation layer for directed self-assembly patterning process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9892914B2Feb 13, 2018
Orientation layer for directed self-assembly patterning process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49