Inventor
HAUG DANIEL
DE7 patents
Patents
7 patentsUS11397121B2Jul 26, 2022
Micromechanical pressure sensor system and method for manufacturing a micromechanical pressure sensor system
BOSCH GMBH ROBERT1 citations58
US12195330B2Jan 14, 2025
Method for producing a plurality of sensor devices, and sensor device
BOSCH GMBH ROBERT0 citations56
US11390519B2Jul 19, 2022
Method for manufacturing a MEMS sensor
BOSCH GMBH ROBERT0 citations54
US10775253B2Sep 15, 2020
Method for producing a micromechanical component with an exposed pressure sensor device and micromechanical component
BOSCH GMBH ROBERT0 citations48
US11370654B2Jun 28, 2022
Device for protecting components against liquids and for ventilating the same
BOSCH GMBH ROBERT0 citations47
US10684185B2Jun 16, 2020
Sensor and/or sound detection device and manufacturing method for a sensor and/or sound detection device
BOSCH GMBH ROBERT0 citations38
US10442681B2Oct 15, 2019
Micromechanical system including a sensitive element and associated manufacturing method
BOSCH GMBH ROBERT0 citations37