Inventor
LORUSSO GIAN FRANCESCO
BE15 patents
⚠️ This page may combine multiple inventors who share the name “LORUSSO GIAN FRANCESCO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
10 patentsUS6815675B1Nov 9, 2004
Method and system for e-beam scanning
KLA TENCOR TECH CORP19 citations92
US6930308B1Aug 16, 2005
SEM profile and surface reconstruction using multiple data sets
KLA TENCOR TECH CORP38 citations87
US7423269B1Sep 9, 2008
Automated feature analysis with off-axis tilting
KLA TENCOR TECH CORP12 citations81
US7276690B1Oct 2, 2007
Method and system for e-beam scanning
KLA TENCOR TECH CORP8 citations73
US6670612B1Dec 30, 2003
Undercut measurement using SEM
KLA TENCOR TECH CORP11 citations73
US7041976B1May 9, 2006
Automated focusing of electron image
KLA TENCOR TECH CORP10 citations70
US7015468B1Mar 21, 2006
Methods of stabilizing measurement of ArF resist in CD-SEM
KLA TENCOR TECH CORP10 citations67
US6784425B1Aug 31, 2004
Energy filter multiplexing
KLA TENCOR TECH CORP7 citations63
US7098456B1Aug 29, 2006
Method and apparatus for accurate e-beam metrology
KLA TENCOR TECH CORP5 citations56
US7405402B1Jul 29, 2008
Method and apparatus for aberration-insensitive electron beam imaging
KLA TENCOR TECH CORP0 citations48