Inventor
SU YING-CHI
TW7 patents
Patents
7 patentsUS11232947B1Jan 25, 2022
Ammonium fluoride pre-clean protection
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations85
US11373905B2Jun 28, 2022
Semiconductor device pre-cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US12300900B2May 13, 2025
Ammonium fluoride pre-clean protection
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12300542B2May 13, 2025
Semiconductor device pre-cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11915976B2Feb 27, 2024
Semiconductor device pre-cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12438003B2Oct 7, 2025
Semiconductor structure and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US12419077B2Sep 16, 2025
Method for forming dual silicide in manufacturing process of semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51