Inventor
LIN WEI-KEN
TW29 patents
Patents
29 patentsUS10304677B2May 28, 2019
Low-k feature formation processes and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations82
US9691766B1Jun 27, 2017
Fin field effect transistor and method for fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD16 citations82
US10833170B2Nov 10, 2020
Low-k gate spacer and methods for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10658252B2May 19, 2020
Semiconductor structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10490650B2Nov 26, 2019
Low-k gate spacer and methods for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10269664B2Apr 23, 2019
Semiconductor structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10964548B2Mar 30, 2021
Fin field-effect transistor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US10854713B2Dec 1, 2020
Method for forming trench structure of semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US10497577B2Dec 3, 2019
Fin field-effect transistor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US9871100B2Jan 16, 2018
Trench structure of semiconductor device having uneven nitrogen distribution liner
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10797175B2Oct 6, 2020
Fin field-effect transistor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10340384B2Jul 2, 2019
Method of manufacturing fin field-effect transistor device
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71
US11205597B2Dec 21, 2021
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations66
US12464786B2Nov 4, 2025
Semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11855182B2Dec 26, 2023
Low-k gate spacer and methods for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12506001B2Dec 23, 2025
Low-K feature formation processes and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12125908B2Oct 22, 2024
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11735430B2Aug 22, 2023
Fin field-effect transistor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11705327B2Jul 18, 2023
Low-k feature formation processes and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11450772B2Sep 20, 2022
Fin field-effect transistor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11342454B2May 24, 2022
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11295948B2Apr 5, 2022
Low-K feature formation processes and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10950431B2Mar 16, 2021
Low-k feature formation processes and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11942418B2Mar 26, 2024
Semiconductor structure and method for making the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9824943B2Nov 21, 2017
Semiconductor structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10847634B2Nov 24, 2020
Field effect transistor and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10700197B2Jun 30, 2020
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10504898B2Dec 10, 2019
Fin field-effect transistor structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9991154B2Jun 5, 2018
Method for fabricating a fin field effect transistor and a shallow trench isolation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations30