Inventor

MACINTOSH EDWARD D

US7 patents

⚠️ This page may combine multiple inventors who share the name “MACINTOSH EDWARD D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN ASSOCIATES

2 patents

US4449885AMay 22, 1984

Wafer transfer system

VARIAN ASSOCIATES183 citations97

US4836733AJun 6, 1989

Wafer transfer system

VARIAN ASSOCIATES242 citations96

VARIAN SEMICONDUCTOR EQUIPMENT

2 patents

US7279687B2Oct 9, 2007

Technique for implementing a variable aperture lens in an ion implanter

VARIAN SEMICONDUCTOR EQUIPMENT11 citations82

US7109499B2Sep 19, 2006

Apparatus and methods for two-dimensional ion beam profiling

VARIAN SEMICONDUCTOR EQUIPMENT14 citations82

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

2 patents

US10658207B2May 19, 2020

Platen for reducing particle contamination on a substrate and a method thereof

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations48

US9953849B2Apr 24, 2018

Platen for reducing particle contamination on a substrate and a method thereof

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations48

SUURONEN DAVID E

1 patent

US8681472B2Mar 25, 2014

Platen ground pin for connecting substrate to ground

SUURONEN DAVID E0 citations42