Inventor

TABATA MITSUO

JP19 patents

⚠️ This page may combine multiple inventors who share the name “TABATA MITSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TABATA MITSUO

TOSHIBA KK

Optical substrate inspection apparatus

Sample inspection apparatus and sample inspection method

Method of inspecting a pattern formed on a sample for a defect, and an apparatus thereof

Method for aligning first and second objects relative to each other and apparatus for practicing this method

Pattern defect inspection apparatus

Method and system for generating a bit pattern

Pattern inspection apparatus

Sample inspection apparatus and sample inspection method

Method and device for aligning first and second objects relative to each other

Pattern inspection apparatus and pattern inspection method

Position detecting method for detecting the relative positions of the first and second members

Method of aligning two members utilizing marks provided thereon

Pattern evaluation apparatus and a method of pattern evaluation

TOKYO SHIBAURA ELECTRIC CO

Image processing system

Electron beam pattern transfer system having an autofocusing mechanism

Position detector by vibrating a light beam for averaging the reflected light

TOPCON CORP

Apparatus for inspecting slight defects on a photomask pattern

Method and apparatus for inspecting slight defects in a photomask pattern

AGENCY IND SCIENCE TECHN

Image memory device