Inventor

VITKAVAGE DANIEL J

US8 patents

⚠️ This page may combine multiple inventors who share the name “VITKAVAGE DANIEL J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LUCENT TECHNOLOGIES INC

2 patents

US5858873AJan 12, 1999

Integrated circuit having amorphous silicide layer in contacts and vias and method of manufacture thereof

LUCENT TECHNOLOGIES INC45 citations95

US6028359AFeb 22, 2000

Integrated circuit having amorphous silicide layer in contacts and vias and method of manufacture therefor

LUCENT TECHNOLOGIES INC34 citations91

AT & T BELL LAB

2 patents

US5200358AApr 6, 1993

Integrated circuit with planar dielectric layer

AT & T BELL LAB58 citations94

US5022958AJun 11, 1991

Method of etching for integrated circuits with planarized dielectric

AT & T BELL LAB68 citations91

AGERE SYSTEMS INC

2 patents

US6680542B1Jan 20, 2004

Damascene structure having a metal-oxide-metal capacitor associated therewith

AGERE SYSTEMS INC38 citations91

US6555910B1Apr 29, 2003

Use of small openings in large topography features to improve dielectric thickness control and a method of manufacture thereof

AGERE SYSTEMS INC2 citations57

RES TRIANGLE INST

1 patent

US5168330ADec 1, 1992

Semiconductor device having a semiconductor substrate interfaced to a dissimilar material by means of a single crystal pseudomorphic interlayer

RES TRIANGLE INST11 citations71

AGERE SYST GUARDIAN CORP

1 patent

US6280644B1Aug 28, 2001

Method of planarizing a surface on an integrated circuit

AGERE SYST GUARDIAN CORP13 citations68