Inventor

BIGGERSTAFF REX L

US2 patents

⚠️ This page may combine multiple inventors who share the name “BIGGERSTAFF REX L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FSI CORP

1 patent

US4749440AJun 7, 1988

Gaseous process and apparatus for removing films from substrates

FSI CORP633 citations96

FSI INT INC

1 patent

US5169408ADec 8, 1992

Apparatus for wafer processing with in situ rinse

FSI INT INC201 citations94