Inventor
OBATA MASANORI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “OBATA MASANORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
4 patentsUS4731516AMar 15, 1988
Laser polishing semiconductor wafer
MITSUBISHI ELECTRIC CORP56 citations95
US4913090AApr 3, 1990
Chemical vapor deposition apparatus having cooling heads adjacent to gas dispersing heads in a single chamber
MITSUBISHI ELECTRIC CORP77 citations94
US5321634AJun 14, 1994
Automatic thin-film measuring apparatus
MITSUBISHI ELECTRIC CORP91 citations92
US5306947AApr 26, 1994
Semiconductor device and manufacturing method thereof
MITSUBISHI ELECTRIC CORP32 citations90