Inventor
SHELTON GAIL D
US24 patents
⚠️ This page may combine multiple inventors who share the name “SHELTON GAIL D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
13 patentsUS6383332B1May 7, 2002
Endpoint detection method and apparatus which utilize a chelating agent to detect a polishing endpoint
LSI LOGIC CORP20 citations92
US6358819B1Mar 19, 2002
Dual gate oxide process for deep submicron ICS
LSI LOGIC CORP32 citations92
US6117779ASep 12, 2000
Endpoint detection method and apparatus which utilize a chelating agent to detect a polishing endpoint
LSI LOGIC CORP17 citations92
US6090724AJul 18, 2000
Method for composing a thermally conductive thin film having a low dielectric property
LSI LOGIC CORP25 citations92
US6258205B1Jul 10, 2001
Endpoint detection method and apparatus which utilize an endpoint polishing layer of catalyst material
LSI LOGIC CORP17 citations91
US6080670AJun 27, 2000
Method of detecting a polishing endpoint layer of a semiconductor wafer which includes a non-reactive reporting specie
LSI LOGIC CORP31 citations91
US6071818AJun 6, 2000
Endpoint detection method and apparatus which utilize an endpoint polishing layer of catalyst material
LSI LOGIC CORP22 citations91
US6136719AOct 24, 2000
Method and arrangement for fabricating a semiconductor device
LSI LOGIC CORP18 citations84
US6287987B1Sep 11, 2001
Method and apparatus for deposition of porous silica dielectrics
LSI LOGIC CORP7 citations74
US6206573B1Mar 27, 2001
High reliability bearing structure
LSI LOGIC CORP9 citations74
US6150175ANov 21, 2000
Copper contamination control of in-line probe instruments
LSI LOGIC CORP9 citations74
US6806162B1Oct 19, 2004
Method for composing a dielectric layer within an interconnect structure of a multilayer semiconductor device
LSI LOGIC CORP3 citations63
US6614097B1Sep 2, 2003
Method for composing a dielectric layer within an interconnect structure of a multilayer semiconductor device
LSI LOGIC CORP2 citations63
TEXAS INSTRUMENTS INC
9 patentsUS5457318AOct 10, 1995
Thermal detector apparatus and method using reduced thermal capacity
TEXAS INSTRUMENTS INC20 citations92
US5424544AJun 13, 1995
Inter-pixel thermal isolation for hybrid thermal detectors
TEXAS INSTRUMENTS INC52 citations92
US5478242ADec 26, 1995
Thermal isolation of hybrid thermal detectors through an anisotropic etch
TEXAS INSTRUMENTS INC18 citations81
US5604977AFeb 25, 1997
Method of fabricating focal plane array
TEXAS INSTRUMENTS INC8 citations73
US5578826ANov 26, 1996
Thermal isolation for hybrid thermal detectors
TEXAS INSTRUMENTS INC11 citations72
US5574282ANov 12, 1996
Thermal isolation for hybrid thermal detectors
TEXAS INSTRUMENTS INC6 citations72
US5426303AJun 20, 1995
Thermal isolation structure for hybrid thermal detectors
TEXAS INSTRUMENTS INC11 citations72
US5653851AAug 5, 1997
Method and apparatus for etching titanate with organic acid reagents
TEXAS INSTRUMENTS INC5 citations63
US5572059ANov 5, 1996
Thermal isolation of hybrid thermal detectors through an anisotropic etch
TEXAS INSTRUMENTS INC4 citations62