Inventor
MUENZEL HORST
DE32 patents
⚠️ This page may combine multiple inventors who share the name “MUENZEL HORST”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BOSCH GMBH ROBERT
26 patentsUS5723353AMar 3, 1998
Process for manufacturing a sensor
BOSCH GMBH ROBERT106 citations98
US5616514AApr 1, 1997
Method of fabricating a micromechanical sensor
BOSCH GMBH ROBERT109 citations98
US6106735AAug 22, 2000
Wafer stack and method of producing sensors
BOSCH GMBH ROBERT102 citations97
US6214243B1Apr 10, 2001
Process for producing a speed of rotation coriolis sensor
BOSCH GMBH ROBERT78 citations96
US5721377AFeb 24, 1998
Angular velocity sensor with built-in limit stops
BOSCH GMBH ROBERT74 citations96
US5616523AApr 1, 1997
Method of manufacturing sensor
BOSCH GMBH ROBERT59 citations96
US5569852AOct 29, 1996
Capacitive accelerometer sensor and method for its manufacture
BOSCH GMBH ROBERT55 citations96
US5071510ADec 10, 1991
Process for anisotropic etching of silicon plates
BOSCH GMBH ROBERT105 citations96
US6318175B1Nov 20, 2001
Micromechanical sensor and method for the manufacture thereof
BOSCH GMBH ROBERT76 citations95
US6055858AMay 2, 2000
Acceleration sensor
BOSCH GMBH ROBERT55 citations95
US5937275AAug 10, 1999
Method of producing acceleration sensors
BOSCH GMBH ROBERT67 citations95
US5629538AMay 13, 1997
Semiconductor sensor having a protective layer
BOSCH GMBH ROBERT53 citations95
US7394349B2Jul 1, 2008
Device and method to detect presence in a motor vehicle
BOSCH GMBH ROBERT19 citations92
US6465854B1Oct 15, 2002
Micromechanical component
BOSCH GMBH ROBERT36 citations92
US6140709AOct 31, 2000
Bonding pad structure and method for manufacturing the bonding pad structure
BOSCH GMBH ROBERT26 citations92
US6117701ASep 12, 2000
Method for manufacturing a rate-of-rotation sensor
BOSCH GMBH ROBERT47 citations92
US6076404AJun 20, 2000
Micromechanical sensor including a single-crystal silicon support
BOSCH GMBH ROBERT21 citations92
US5542558AAug 6, 1996
Method for manufacturing micro-mechanical components using selective anodization of silicon
BOSCH GMBH ROBERT36 citations92
US5461917AOct 31, 1995
Acceleration sensor
BOSCH GMBH ROBERT23 citations92
US5703287ADec 30, 1997
Measuring element for a flow sensor
BOSCH GMBH ROBERT22 citations91
US5705745AJan 6, 1998
Mass flow sensor
BOSCH GMBH ROBERT51 citations90
US5507186AApr 16, 1996
Pressure sensor
BOSCH GMBH ROBERT8 citations73
US6268232B1Jul 31, 2001
Method for fabricating a micromechanical component
BOSCH GMBH ROBERT12 citations72
US5421952AJun 6, 1995
Method for the manufacture of silicon injection plates and silicon plates produced thereby
BOSCH GMBH ROBERT10 citations72
US6656368B2Dec 2, 2003
Nonstick layer for a micromechanical component
BOSCH GMBH ROBERT4 citations61
US6189205B1Feb 20, 2001
Process for producing pressure sensors
BOSCH GMBH ROBERT6 citations61
CIBA GEIGY CORP
4 patentsUS5106718AApr 21, 1992
Positive photoresist composition containing alkali-soluble phenolic resin, photosensitive quinonediazide compound and sulfonyl containing compound
CIBA GEIGY CORP25 citations92
US5077173ADec 31, 1991
Positive photoresist containing 2,3,4-trihydroxybenzophenone and 1,2-naphthoquinone-diazide-5-sulfonyl trisester of 1,3,5-trihydroxybenzene
CIBA GEIGY CORP15 citations74
US5219701AJun 15, 1993
Positive photoresist containing 1,2-naphthoquinone-diazide-5-sulfonyl tris ester of 1,3,5-trihydroxybenzene and aromatic hydroxy compound sensitizer
CIBA GEIGY CORP3 citations63
US5200293AApr 6, 1993
Photoresist composition containing specific amounts of a naphthoquinone diazide sulfonyl ester of tetrahydroxy diphenyl sulfide and a polyhydroxy compound
CIBA GEIGY CORP5 citations63