Inventor

BAUMANN HELMUT

DE20 patents

⚠️ This page may combine multiple inventors who share the name “BAUMANN HELMUT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BAUMANN HELMUT

BOSCH GMBH ROBERT

Wafer stack and method of producing sensors

Angular velocity sensor with built-in limit stops

Semiconductor sensor having a protective layer

Method of assembling micromechanical sensors

Micromechanical device

Micromechanical component

Micromechanical cap structure and the respective manufacturing method

Acceleration sensor

Sensor with at least one micromechanical structure and method for production thereof

Mass flow sensor

Method for dicing composite wafers

Method for manufacturing semiconductor components having micromechanical structures

Method of making sensor

Sensor with at least one micromechanical structure, and method for producing it

Method for producing a component according to the anodic bonding method and component

Method of producing structured wafers

Device made of single-crystal silicon

Housing for electronic component, and method of producing the same

RIEDHAMMER LUDWIG GMBH

Sintering furnace

KAELBERER ARND

Device made of single-crystal silicon