Inventor

TAN EN-TIEN

TW4 patents

Patents

4 patents

US6062442AMay 16, 2000

Dispense system of a photoresist coating machine

UNITED MICROELECTRONICS CORP25 citations91

US6099646AAug 8, 2000

Dispensing system of a coater

UNITED MICROELECTRONICS CORP6 citations60

US6048399AApr 11, 2000

SOG coater nozzle pot

UNITED MICROELECTRONICS CORP2 citations60

US5740580AApr 21, 1998

Stepper vacuum chuck wiper

UNITED MICROELECTRONICS CORP6 citations52