Inventor

HADA KAZUNARI

JP7 patents

⚠️ This page may combine multiple inventors who share the name “HADA KAZUNARI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIPPON KOGAKU KK

4 patents

US4589139AMay 13, 1986

Apparatus for detecting defects in pattern

NIPPON KOGAKU KK48 citations92

US4506382AMar 19, 1985

Apparatus for detecting two-dimensional pattern and method for transforming the pattern into binary image

NIPPON KOGAKU KK45 citations92

US4479145AOct 23, 1984

Apparatus for detecting the defect of pattern

NIPPON KOGAKU KK44 citations92

US4472738ASep 18, 1984

Pattern testing apparatus

NIPPON KOGAKU KK8 citations73

NIKON CORP

3 patents

US5912096AJun 15, 1999

Charged-particle-beam exposure method with temperature-compensated exposure to offset expansion and contraction of substrate

NIKON CORP19 citations91

US6200710B1Mar 13, 2001

Methods for producing segmented reticles

NIKON CORP16 citations82

US6156464ADec 5, 2000

Scanning-type charged-particle beam exposure methods including scan-velocity error detection and correction

NIKON CORP9 citations72