Inventor

WONG MANUS

US5 patents

⚠️ This page may combine multiple inventors who share the name “WONG MANUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

4 patents

US6170428B1Jan 9, 2001

Symmetric tunable inductively coupled HDP-CVD reactor

APPLIED MATERIALS INC430 citations98

US5761023AJun 2, 1998

Substrate support with pressure zones having reduced contact area and temperature feedback

APPLIED MATERIALS INC218 citations98

US6083344AJul 4, 2000

Multi-zone RF inductively coupled source configuration

APPLIED MATERIALS INC346 citations97

US5522937AJun 4, 1996

Welded susceptor assembly

APPLIED MATERIALS INC58 citations94

ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA

1 patent

US11626314B2Apr 11, 2023

Lift pin assembly, an electrostatic chuck and a processing apparatus where the electrostatic chuck is located

ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA1 citations56