Inventor
MOHN JON
US8 patents
Patents
8 patentsUS6024826AFeb 15, 2000
Plasma reactor with heated source of a polymer-hardening precursor material
APPLIED MATERIALS INC100 citations97
US6218312B1Apr 17, 2001
Plasma reactor with heated source of a polymer-hardening precursor material
APPLIED MATERIALS INC61 citations96
US5762714AJun 9, 1998
Plasma guard for chamber equipped with electrostatic chuck
APPLIED MATERIALS INC68 citations95
US5437757AAug 1, 1995
Clamp ring for domed pedestal in wafer processing chamber
APPLIED MATERIALS INC58 citations95
US6440866B1Aug 27, 2002
Plasma reactor with heated source of a polymer-hardening precursor material
APPLIED MATERIALS INC22 citations92
US6036877AMar 14, 2000
Plasma reactor with heated source of a polymer-hardening precursor material
APPLIED MATERIALS INC30 citations92
US5990017ANov 23, 1999
Plasma reactor with heated source of a polymer-hardening precursor material
APPLIED MATERIALS INC32 citations92
US6193836B1Feb 27, 2001
Center gas feed apparatus for a high density plasma reactor
APPLIED MATERIALS INC9 citations74