Inventor
WONG YUEN-KUI
US7 patents
⚠️ This page may combine multiple inventors who share the name “WONG YUEN-KUI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED KOMATSU TECHNOLOGY INC
4 patentsUS5607602AMar 4, 1997
High-rate dry-etch of indium and tin oxides by hydrogen and halogen radicals such as derived from HCl gas
APPLIED KOMATSU TECHNOLOGY INC63 citations94
US6036876AMar 14, 2000
Dry-etching of indium and tin oxides
APPLIED KOMATSU TECHNOLOGY INC48 citations92
US5893757AApr 13, 1999
Tapered profile etching method
APPLIED KOMATSU TECHNOLOGY INC21 citations92
US5843277ADec 1, 1998
Dry-etch of indium and tin oxides with C2H5I gas
APPLIED KOMATSU TECHNOLOGY INC30 citations92
APPLIED MATERIALS INC
3 patentsUS6218312B1Apr 17, 2001
Plasma reactor with heated source of a polymer-hardening precursor material
APPLIED MATERIALS INC61 citations96
US6440866B1Aug 27, 2002
Plasma reactor with heated source of a polymer-hardening precursor material
APPLIED MATERIALS INC22 citations92
US6036877AMar 14, 2000
Plasma reactor with heated source of a polymer-hardening precursor material
APPLIED MATERIALS INC30 citations92