Inventor
KESWICK PETER
US11 patents
⚠️ This page may combine multiple inventors who share the name “KESWICK PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS5399237AMar 21, 1995
Etching titanium nitride using carbon-fluoride and carbon-oxide gas
APPLIED MATERIALS INC275 citations98
US5158644AOct 27, 1992
Reactor chamber self-cleaning process
APPLIED MATERIALS INC222 citations98
US6024826AFeb 15, 2000
Plasma reactor with heated source of a polymer-hardening precursor material
APPLIED MATERIALS INC100 citations97
US6218312B1Apr 17, 2001
Plasma reactor with heated source of a polymer-hardening precursor material
APPLIED MATERIALS INC61 citations96
US6440866B1Aug 27, 2002
Plasma reactor with heated source of a polymer-hardening precursor material
APPLIED MATERIALS INC22 citations92
US6194325B1Feb 27, 2001
Oxide etch process with high selectivity to nitride suitable for use on surfaces of uneven topography
APPLIED MATERIALS INC41 citations92
US6036877AMar 14, 2000
Plasma reactor with heated source of a polymer-hardening precursor material
APPLIED MATERIALS INC30 citations92
US5990017ANov 23, 1999
Plasma reactor with heated source of a polymer-hardening precursor material
APPLIED MATERIALS INC32 citations92