Inventor
MORITA SHINZO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “MORITA SHINZO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAIKIN IND LTD
3 patentsUS4421843ADec 20, 1983
Process for forming film of fluoroalkyl acrylate polymer on substrate and process for preparing patterned resist from the film
DAIKIN IND LTD24 citations81
US4382985AMay 10, 1983
Process for forming film of fluoroalkyl acrylate polymer on substrate and process for preparing patterned resist from the film
DAIKIN IND LTD24 citations81
US4421842ADec 20, 1983
Process for forming film of fluoroalkyl acrylate polymer on substrate and process for preparing patterned resist from the film
DAIKIN IND LTD3 citations61