P

Inventor

TAYLOR KELLY J

US25 patents
⚠️ This page may combine multiple inventors who share the name “TAYLOR KELLY J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TEXAS INSTRUMENTS INC

19 patents
US7001821B2Feb 21, 2006

Method of forming and using a hardmask for forming ferroelectric capacitors in a semiconductor device

TEXAS INSTRUMENTS INC63 citations98
US6465350B1Oct 15, 2002

Aluminum nitride thin film formation on integrated circuits

TEXAS INSTRUMENTS INC104 citations98
US6351039B1Feb 26, 2002

Integrated circuit dielectric and method

TEXAS INSTRUMENTS INC99 citations97
US5751582AMay 12, 1998

Controlling process modules using site models and monitor wafer control

TEXAS INSTRUMENTS INC97 citations97
US5818111AOct 6, 1998

Low capacitance interconnect structures in integrated circuits using a stack of low dielectric materials

TEXAS INSTRUMENTS INC86 citations96
US5528153AJun 18, 1996

Method for non-destructive, non-contact measurement of dielectric constant of thin films

TEXAS INSTRUMENTS INC68 citations96
US7514734B2Apr 7, 2009

Hardmask for forming ferroelectric capacitors in a semiconductor device and methods for fabricating the same

TEXAS INSTRUMENTS INC42 citations92
US6114186ASep 5, 2000

Hydrogen silsesquioxane thin films for low capacitance structures in integrated circuits

TEXAS INSTRUMENTS INC28 citations92
US5888905AMar 30, 1999

Integrated circuit insulator and method

TEXAS INSTRUMENTS INC23 citations92
US6876021B2Apr 5, 2005

Use of amorphous aluminum oxide on a capacitor sidewall for use as a hydrogen barrier

TEXAS INSTRUMENTS INC43 citations91
US5882981AMar 16, 1999

Mesa isolation Refill Process for Silicon on Insulator Technology Using Flowage Oxides as the Refill Material

TEXAS INSTRUMENTS INC49 citations90
US7361949B2Apr 22, 2008

Method of making a haze free, lead rich PZT film

TEXAS INSTRUMENTS INC2 citations63
US7144808B1Dec 5, 2006

Integration flow to prevent delamination from copper

TEXAS INSTRUMENTS INC2 citations63
US7153706B2Dec 26, 2006

Ferroelectric capacitor having a substantially planar dielectric layer and a method of manufacture therefor

TEXAS INSTRUMENTS INC4 citations62
US7332425B2Feb 19, 2008

Simultaneous deposition and etch process for barrier layer formation in microelectronic device interconnects

TEXAS INSTRUMENTS INC2 citations61
US12411337B2Sep 9, 2025

System and method for MEMS devices

TEXAS INSTRUMENTS INC0 citations55
US7897410B2Mar 1, 2011

Close proximity scanning surface contamination analyzer

TEXAS INSTRUMENTS INC0 citations48
US9656860B2May 23, 2017

Use of metal native oxide to control stress gradient and bending moment of a released MEMS structure

TEXAS INSTRUMENTS INC0 citations43
US9446947B2Sep 20, 2016

Use of metal native oxide to control stress gradient and bending moment of a released MEMS structure

TEXAS INSTRUMENTS INC0 citations43

TAYLOR KELLY J

6 patents