Inventor
OOSHIMA YOSHIMASA
JP10 patents
⚠️ This page may combine multiple inventors who share the name “OOSHIMA YOSHIMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
5 patentsUS6797975B2Sep 28, 2004
Method and its apparatus for inspecting particles or defects of a semiconductor device
HITACHI LTD56 citations96
US7315366B2Jan 1, 2008
Apparatus and method for inspecting defects
HITACHI LTD17 citations92
US7231079B2Jun 12, 2007
Method and system for inspecting electronic circuit pattern
HITACHI LTD44 citations92
US7187438B2Mar 6, 2007
Apparatus and method for inspecting defects
HITACHI LTD25 citations92
US7511806B2Mar 31, 2009
Apparatus and method for inspecting defects
HITACHI LTD7 citations74
HITACHI HIGH TECH CORP
3 patentsUS7256412B2Aug 14, 2007
Method and its apparatus for inspecting particles or defects of a semiconductor device
HITACHI HIGH TECH CORP5 citations74
US7115892B2Oct 3, 2006
Method and its apparatus for inspecting particles or defects of a semiconductor device
HITACHI HIGH TECH CORP7 citations74
US6998630B2Feb 14, 2006
Method and its apparatus for inspecting particles or defects of a semiconductor device
HITACHI HIGH TECH CORP2 citations63