Inventor
NIKO HIDEO
JP3 patents
Patents
3 patentsUS6762129B2Jul 13, 2004
Dry etching method, fabrication method for semiconductor device, and dry etching apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD8 citations71
US7341922B2Mar 11, 2008
Dry etching method, fabrication method for semiconductor device, and dry etching apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD2 citations60
US7148151B2Dec 12, 2006
Dry etching method, fabrication method for semiconductor device, and dry etching apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD2 citations60