Inventor
HATCHER BRIAN K
US11 patents
⚠️ This page may combine multiple inventors who share the name “HATCHER BRIAN K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS7264688B1Sep 4, 2007
Plasma reactor apparatus with independent capacitive and toroidal plasma sources
APPLIED MATERIALS INC73 citations97
US6379575B1Apr 30, 2002
Treatment of etching chambers using activated cleaning gas
APPLIED MATERIALS INC375 citations97
US7780864B2Aug 24, 2010
Process using combined capacitively and inductively coupled plasma sources for controlling plasma ion radial distribution
APPLIED MATERIALS INC21 citations92
US7777152B2Aug 17, 2010
High AC current high RF power AC-RF decoupling filter for plasma reactor heated electrostatic chuck
APPLIED MATERIALS INC26 citations92
US7645357B2Jan 12, 2010
Plasma reactor apparatus with a VHF capacitively coupled plasma source of variable frequency
APPLIED MATERIALS INC40 citations92
US7674394B2Mar 9, 2010
Plasma process for inductively coupling power through a gas distribution plate while adjusting plasma distribution
APPLIED MATERIALS INC17 citations84
US7727413B2Jun 1, 2010
Dual plasma source process using a variable frequency capacitively coupled source to control plasma ion density
APPLIED MATERIALS INC5 citations62
US8017526B2Sep 13, 2011
Gate profile control through effective frequency of dual HF/VHF sources in a plasma etch process
APPLIED MATERIALS INC1 citations50