Inventor
SAMMONS III JAMES E
US4 patents
Patents
4 patentsUS7777152B2Aug 17, 2010
High AC current high RF power AC-RF decoupling filter for plasma reactor heated electrostatic chuck
APPLIED MATERIALS INC26 citations92
US6158384ADec 12, 2000
Plasma reactor with multiple small internal inductive antennas
APPLIED MATERIALS INC56 citations92
US6178920B1Jan 30, 2001
Plasma reactor with internal inductive antenna capable of generating helicon wave
APPLIED MATERIALS INC35 citations89
US5856906AJan 5, 1999
Backside gas quick dump apparatus for a semiconductor wafer processing system
APPLIED MATERIALS INC31 citations89