Inventor
DEN BOEF ARIE JEFFREY MARIA
NL10 patents
⚠️ This page may combine multiple inventors who share the name “DEN BOEF ARIE JEFFREY MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS7213963B2May 8, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV196 citations99
US7791732B2Sep 7, 2010
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV80 citations98
US8054467B2Nov 8, 2011
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV15 citations92
US10241055B2Mar 26, 2019
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV3 citations83
US7961309B2Jun 14, 2011
Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate
ASML NETHERLANDS BV4 citations62
LOF JOERI
4 patentsUS8482845B2Jul 9, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI32 citations96
US9541843B2Jan 10, 2017
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid
LOF JOERI0 citations52
US9081299B2Jul 14, 2015
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap
LOF JOERI0 citations52
US9152058B2Oct 6, 2015
Lithographic apparatus and device manufacturing method involving a member and a fluid opening
LOF JOERI0 citations51