Inventor
VAN DOMMELEN YOURI JOHANNES LAURENTIUS MARIA
NL16 patents
⚠️ This page may combine multiple inventors who share the name “VAN DOMMELEN YOURI JOHANNES LAURENTIUS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS7791732B2Sep 7, 2010
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV80 citations98
US8760662B2Jun 24, 2014
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV16 citations92
US8054467B2Nov 8, 2011
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV15 citations92
US10241055B2Mar 26, 2019
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV3 citations83
US10955353B2Mar 23, 2021
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV2 citations73
US10001711B2Jun 19, 2018
Inspection method, lithographic apparatus, mask and substrate
ASML NETHERLANDS BV3 citations70
US11525786B2Dec 13, 2022
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV0 citations62
US10394137B2Aug 27, 2019
Inspection method, lithographic apparatus, mask and substrate
ASML NETHERLANDS BV1 citations60
US10175585B2Jan 8, 2019
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations48