Inventor

KIERS ANTOINE GASTON MARIE

NL36 patents

⚠️ This page may combine multiple inventors who share the name “KIERS ANTOINE GASTON MARIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KIERS ANTOINE GASTON MARIE

ASML NETHERLANDS BV

Method and apparatus for angular-resolved spectroscopic lithography characterization

Method and apparatus for angular-resolved spectroscopic lithography characterization

Device inspection method and apparatus using an asymmetric marker

Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method

Method and apparatus for angular-resolved spectroscopic lithography characterization

Method and apparatus for angular-resolved spectroscopic lithography characterization

Deep learning for semantic segmentation of pattern

Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method

Method and apparatus for angular-resolved spectroscopic lithography characterization

Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method

Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method

Method for predicting a critical dimension of a feature imaged by a lithographic apparatus

Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method

Test pattern, inspection method, and device manufacturing method

Method and apparatus for angular-resolved spectroscopic lithography characterization

Device manufacturing method and computer program product

Method to determine the usefulness of alignment marks to correct overlay, and a combination of a lithographic apparatus and an overlay measurement system

Focus determination method, device manufacturing method, and mask

Test pattern, inspection method, and device manufacturing method

Deep learning for semantic segmentation of pattern

Method and apparatus for angular-resolved spectroscopic lithography characterization

Method and apparatus for angular-resolved spectroscopic lithography characterization

Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method

Method in the manufacturing process of a device, a non-transitory computer-readable medium and a system configured to perform the method

Method of measuring variation, inspection system, computer program, and computer system

Method of measuring variation, inspection system, computer program, and computer system

Method of forming a substrate for use in calibrating a metrology tool, calibration substrate and metrology tool calibration method

Method of determining focus corrections, lithographic processing cell and device manufacturing method

CRAMER HUGO AUGUSTINUS JOSEPH

Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method

Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method

VAN DE KERKHOF MARCUS ADRIANUS

Inspection apparatus for lithography

DEN BOEF ARIE JEFFREY MARIA

Method and apparatus for angular-resolved spectroscopic lithography characterization

KISTEMAN AREND JOHANNES

Method of determining focus corrections, lithographic processing cell and device manufacturing method

KIERS ANTOINE GASTON MARIE

Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method

QUAEDACKERS JOHANNES ANNA

Method of measuring a characteristic

VAN DER LAAN HANS

Method to determine the value of process parameters based on scatterometry data