Inventor
LUEHRMANN PAUL FRANK
US13 patents
⚠️ This page may combine multiple inventors who share the name “LUEHRMANN PAUL FRANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
12 patentsUS7791732B2Sep 7, 2010
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV80 citations98
US7112813B2Sep 26, 2006
Device inspection method and apparatus using an asymmetric marker
ASML NETHERLANDS BV61 citations96
US8760662B2Jun 24, 2014
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV16 citations92
US8054467B2Nov 8, 2011
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV15 citations92
US10241055B2Mar 26, 2019
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV3 citations83
US10955353B2Mar 23, 2021
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV2 citations73
US7403259B2Jul 22, 2008
Lithographic processing cell, lithographic apparatus, track and device manufacturing method
ASML NETHERLANDS BV7 citations72
US9971251B2May 15, 2018
Lithography system and a machine learning controller for such a lithography system
ASML NETHERLANDS BV2 citations71
US9715181B2Jul 25, 2017
Method of calibrating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product
ASML NETHERLANDS BV3 citations71
US11525786B2Dec 13, 2022
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV0 citations62
US7679715B2Mar 16, 2010
Lithographic processing cell, lithographic apparatus, track and device manufacturing method
ASML NETHERLANDS BV4 citations61
US9507279B2Nov 29, 2016
Method of operating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product
ASML NETHERLANDS BV2 citations59