Inventor
GROUWSTRA CEDRIC DESIRE
NL14 patents
⚠️ This page may combine multiple inventors who share the name “GROUWSTRA CEDRIC DESIRE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS7791732B2Sep 7, 2010
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV80 citations98
US7880860B2Feb 1, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV31 citations96
US8054467B2Nov 8, 2011
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV15 citations92
US9703210B2Jul 11, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations84
US10241055B2Mar 26, 2019
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV3 citations83
US10955353B2Mar 23, 2021
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV2 citations73
US10509326B2Dec 17, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
JANSEN HANS
3 patentsUS8941811B2Jan 27, 2015
Lithographic apparatus and device manufacturing method
JANSEN HANS4 citations83
US8638419B2Jan 28, 2014
Lithographic apparatus and device manufacturing method
JANSEN HANS4 citations83
US8115899B2Feb 14, 2012
Lithographic apparatus and device manufacturing method
JANSEN HANS4 citations73