Inventor
VAN KRAAIJ MARKUS GERARDUS MARTINUS
NL5 patents
⚠️ This page may combine multiple inventors who share the name “VAN KRAAIJ MARKUS GERARDUS MARTINUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
4 patentsUS7791732B2Sep 7, 2010
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV80 citations98
US7791724B2Sep 7, 2010
Characterization of transmission losses in an optical system
ASML NETHERLANDS BV59 citations96
US8054467B2Nov 8, 2011
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV15 citations92
US10241055B2Mar 26, 2019
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV3 citations83