Inventor
YAMAUCHI TORU
JP5 patents
⚠️ This page may combine multiple inventors who share the name “YAMAUCHI TORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS9620402B2Apr 11, 2017
Alignment apparatus and substrate processing apparatus
TOKYO ELECTRON LTD5 citations70
US6754554B2Jun 22, 2004
Semiconductor manufacturing apparatus detecting state of connection between controllers
TOKYO ELECTRON LTD3 citations52
US9810905B2Nov 7, 2017
Support information display method, maintenance support method of substrate processing apparatus, support information display control apparatus, substrate processing system and recording medium
TOKYO ELECTRON LTD0 citations36