Inventor
HOLDEN JAMES MATTHEW
US5 patents
⚠️ This page may combine multiple inventors who share the name “HOLDEN JAMES MATTHEW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS7969568B2Jun 28, 2011
Spectrographic metrology of patterned wafers
APPLIED MATERIALS INC2 citations60
US10217650B2Feb 26, 2019
Methods and apparatus for substrate edge cleaning
APPLIED MATERIALS INC0 citations51
US9443714B2Sep 13, 2016
Methods and apparatus for substrate edge cleaning
APPLIED MATERIALS INC0 citations51
US9177782B2Nov 3, 2015
Methods and apparatus for cleaning a substrate
APPLIED MATERIALS INC1 citations46