Inventor
GENIO EDGAR
US9 patents
⚠️ This page may combine multiple inventors who share the name “GENIO EDGAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS7379185B2May 27, 2008
Evaluation of openings in a dielectric layer
APPLIED MATERIALS INC11 citations83
US8018586B2Sep 13, 2011
Metrology of thin film devices using an addressable micromirror array
APPLIED MATERIALS INC5 citations60
US7969568B2Jun 28, 2011
Spectrographic metrology of patterned wafers
APPLIED MATERIALS INC2 citations60
US7911603B2Mar 22, 2011
Spectrometric metrology of workpieces using a permanent window as a spectral reference
APPLIED MATERIALS INC2 citations60
US8027031B2Sep 27, 2011
Spectrometric metrology of workpieces using a permanent window as a spectral reference
APPLIED MATERIALS INC0 citations50
LI GUOGUANG
3 patentsUS8767209B2Jul 1, 2014
Broadband polarization spectrometer with inclined incidence and optical measurement system
LI GUOGUANG10 citations79
US9170156B2Oct 27, 2015
Normal-incidence broadband spectroscopic polarimeter containing reference beam and optical measurement system
LI GUOGUANG5 citations67
US9176048B2Nov 3, 2015
Normal incidence broadband spectroscopic polarimeter and optical measurement system
LI GUOGUANG0 citations46