Inventor
HANZAWA KOUICHI
JP4 patents
Patents
4 patentsUS7033461B2Apr 25, 2006
Thin film forming apparatus and method
ULVAC INC24 citations92
US7927472B2Apr 19, 2011
Optical film thickness controlling method, optical film thickness controlling apparatus, dielectric multilayer film manufacturing apparatus, and dielectric multilayer film manufactured using the same controlling apparatus or manufacturing apparatus
ULVAC INC26 citations91
US7247345B2Jul 24, 2007
Optical film thickness controlling method and apparatus, dielectric multilayer film and manufacturing apparatus thereof
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US8011315B2Sep 6, 2011
Thin film forming apparatus
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